Cleanroom Technology
Nitto Kohki
The Nitto Kohki Semicon Cupla are designed for cleanroom and semiconductor applications where freedom from particles and media purity are the top priority. The SP and SCT series in electro-polished stainless steel generate only minimal particle quantities on each actuation and are suitable for process gases, purge nitrogen and ultra-pure media in wafer fabrication.
The double-shut-off, low-dead-volume design prevents media entrapment and contamination; the low-particle sleeve mechanism is engineered to SEMI S2 safety guidelines and suited to ISO-class environments. FKM seals and SUS 316L bodies ensure corrosion and media resistance.
Nitto Kohki Cleanroom Technology - Semicon Cupla
| Criterion | Nitto Kohki | Parker | Stäubli | Rectus |
|---|---|---|---|---|
| Dedicated cleanroom series | Yes (Semicon SP/SCT) | Limited | Yes (CGO) | Not specified |
| Cleanroom suitability | low-particle, ISO class | limited | ISO class 4-6 | not specified |
| Material | SUS 316L electro-polished | stainless | stainless | steel/brass |
| Double-side shut-off | Yes | Partial | Yes | Limited |
| SEMI S2 design | Yes | No | Partial | No |
| Ultra-pure gas suitability | Yes | Partial | Yes | No |
| Series | Application | Material | Key feature |
|---|---|---|---|
| Semicon SP Cupla | semiconductor process gases | SUS 316L electro-polished | low-particle, low dead volume |
| Semicon SCT Cupla | cleanroom, ultra-pure media | SUS 316L | double shut-off, SEMI S2 |
Typical applications: semiconductor and wafer fabrication, cleanroom processes in microelectronics and photovoltaics, pharmaceutical and medical technology (GMP), analytical and laboratory technology with ultra-pure gases, and systems to SEMI S2 and ISO 14644.
Series in this category compared
Maximum working pressure is the first selection criterion. It decides the series, not the size: a low pressure coupling does not become high pressure capable by choosing a larger bore.
| Series | Max working pressure | Sizes | Shut-off type | Fluids | Body material | Catalogue page |
|---|---|---|---|---|---|---|
| SEMICON CUPLA SCT Type | 2 bar | SCT Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/4-18NPT, 3/8-18NPT, 1/2-14NPT, 3/4-14NPT, 1-11.5NPT. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT | Two-way shut-off | High purity chemicals, Water, Gas, Air | Polytetrafluoroethylene (PTFE) (SCT Type), Electropolished stainless steel (SUS304) (SCY Type) | 145 |
| SEMICON CUPLA SP Type | 2 bar | SP and SCS Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT, 19/32-18UNS. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT. SCAL Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch. SCF Type: thread 3/8 inch, 1/2 inch / M26, M32 and tube barb ø6 mm x ø8 mm, ø8 mm x ø10 mm | Two-way shut-off (SCAL Type: Two-way shut-off with Spill Reduction) | High purity chemicals, Water, Gas, Air | Electropolished stainless steel (SUS304) (SP, SCS, SCY Type), Polytetrafluoroethylene (PTFE) (SCAL Type), Fluoropolymer resin (PFA) (SCF Type) | 143 |
The four shut-off types
The shut-off type decides what happens on disconnection. It is the second criterion and depends on whether the line is under pressure when it is parted and how much fluid may escape.
Choosing a coupling in five steps
- Fix the fluid and the operating temperature, which gives the seal material.
- Determine the maximum working pressure, which gives the pressure class and the series.
- Choose the shut-off type: one-way, two-way, valveless or flat face.
- Fix the end connection and size: hose barb, male thread, female thread or tube fitter.
- Choose the body material for the fluid and the environment, then order plug and socket as a pair.
This page is based on the Nitto Kohki general catalogue Quick Connect Couplings C01en-b, 190 pages. The complete catalogue is available for download on this page.
