Throttle Check Valves for Clean Rooms
Power and Check Valves
SMC throttle check valves of the AS-FPQ/FPG series are designed for clean room environments and control the exhaust speed of pneumatic cylinders. They combine a throttle for speed adjustment with an integrated check valve for the opposite direction.
The range covers more than 50 items with port sizes from M5 to G1/2 and tube connections from 4 to 12 mm. The clean room design reduces particle emission and suits semiconductor, display and laboratory applications.
These valves are used to regulate cylinder travel speed in clean room cells of semiconductor and electronics manufacturing, in display production and in laboratory and medical technology, where low particle emission is required.
