Special couplings
Cleanroom Technology
The Nitto Kohki Semicon Cupla are designed for cleanroom and semiconductor applications where freedom from particles and media purity are the top priority. The SP and SCT series in electro-polished stainless steel generate only minimal particle quantities on each actuation and are suitable for process gases, purge nitrogen and ultra-pure media in wafer fabrication.
The double-shut-off, low-dead-volume design prevents media entrapment and contamination; the low-particle sleeve mechanism is engineered to SEMI S2 safety guidelines and suited to ISO-class environments. FKM seals and SUS 316L bodies ensure corrosion and media resistance.
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Buying guide
How to choose Cleanroom Technology
What matters when choosing: properties, comparison and typical applications.
Technical advantages - Semicon Cupla at a glance
Cleanroom couplings - Nitto Kohki vs. Parker vs. Stäubli vs. Rectus
| Criterion | Nitto Kohki | Parker | Stäubli | Rectus |
|---|---|---|---|---|
| Dedicated cleanroom series | Yes (Semicon SP/SCT) | Limited | Yes (CGO) | Not specified |
| Cleanroom suitability | low-particle, ISO class | limited | ISO class 4-6 | not specified |
| Material | SUS 316L electro-polished | stainless | stainless | steel/brass |
| Double-side shut-off | Yes | Partial | Yes | Limited |
| SEMI S2 design | Yes | No | Partial | No |
| Ultra-pure gas suitability | Yes | Partial | Yes | No |
Product overview & typical applications
| Series | Application | Material | Key feature |
|---|---|---|---|
| Semicon SP Cupla | semiconductor process gases | SUS 316L electro-polished | low-particle, low dead volume |
| Semicon SCT Cupla | cleanroom, ultra-pure media | SUS 316L | double shut-off, SEMI S2 |
Typical applications: semiconductor and wafer fabrication, cleanroom processes in microelectronics and photovoltaics, pharmaceutical and medical technology (GMP), analytical and laboratory technology with ultra-pure gases, and systems to SEMI S2 and ISO 14644.